The error of transferring the size of a unit of length – a meter in the nanometer range using the nanomeasuring machine

The paper describes the principle of measuring linear dimensions using a nano-measuring machine (NMM), which implements method three coordinate axes in range 25X25X5 mm 3 . Sources non-excluded systematic measurement errors are identified, conventionally divided into factors associated with length an interferometer and determined by design technological features machine. Statistical estimates result have been error transferring size – meter nanometer measurements has calculated. results obtained assert that is unique tool allows one to carry out millimeter accuracy. can be used for metrological assessment step height width, when calibrating instruments range, roughness measures large profilometers contourographs, as well templates micrometer objects high-precision microscopes.